Copyright @ 2009 Journal of New Materials for Electrochemical Systems All rights reserved.
Porous Silicon Membrane for Micro Fuel Cell Applications
Pages: 093-096
N. Torres*, M. Duch, J. Santander, N. Sabate, J. P. Esquivel, A. Tarancon, and C. Cane
Address
Centro Nacional de Microelectrónica (CNM-IMB), CSIC, Campus UAB s/n 08193 Bellaterra, Barcelona, Spain
Abstract:
The requirement of powering new microsystems developed in recent years has focused the research in the improvement of micro fuel cells. In this sense, a monolithically fabricated approach of a micro fuel cell is needed to overcome some material incompatibilities present in the existing hybrid devices. To achieve this goal, porous silicon arises as a promising material. In this work an anodization process and the subsequent characterization of the as-prepared porous silicon is presented. It allowed us fabricating porous silicon membranes with a pore size and specific porosity percentage suitable for its applicability as a proton exchange membranes for micro fuel cell applications.
Keywords:
Porous silicon, membrane, micro fuel cell.
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